Inventor
NUMATA JUN
JP9 patents
Patents
9 patentsUS6933094B2Aug 23, 2005
Radiation-sensitive resin composition
JSR CORP17 citations92
US6280900B1Aug 28, 2001
Radiation-sensitive resin composition
JSR CORP39 citations92
US6623907B2Sep 23, 2003
Radiation-sensitive resin composition
JSR CORP35 citations91
US6465150B1Oct 15, 2002
Radiation-sensitive resin composition
JSR CORP20 citations90
US6517992B1Feb 11, 2003
N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same
JSR CORP15 citations83
US6821705B2Nov 23, 2004
Radiation-sensitive resin composition
JSR CORP11 citations73
US6506537B2Jan 14, 2003
Radiation-sensitive resin composition
JSR CORP11 citations73
US7202016B2Apr 10, 2007
Radiation-sensitive resin composition
JSR CORP4 citations62
US6846607B2Jan 25, 2005
Carbazole derivative and chemically amplified radiation-sensitive resin composition
JSR CORP2 citations61