Inventor
CHANG YAO-CHI
TW4 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YAO-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6919259B2Jul 19, 2005
Method for STI etching using endpoint detection
TAIWAN SEMICONDUCTOR MFG14 citations77
US6455433B1Sep 24, 2002
Method for forming square-shouldered sidewall spacers and devices fabricated
TAIWAN SEMICONDUCTOR MFG14 citations75
US7094653B2Aug 22, 2006
Method for forming STI structures with controlled step height
TAIWAN SEMICONDUCTOR MFG5 citations59