Inventor
KAKIZAKI KOJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAKIZAKI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
USHIO ELECTRIC INC
7 patentsUS6643312B2Nov 4, 2003
ArF excimer laser device and a fluoride laser device
USHIO ELECTRIC INC7 citations72
US6636546B2Oct 21, 2003
ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography
USHIO ELECTRIC INC7 citations72
US6584131B1Jun 24, 2003
ArF excimer laser device for exposure
USHIO ELECTRIC INC7 citations72
US6654402B1Nov 25, 2003
Corona preionization electrode unit for use in gas laser apparatus
USHIO ELECTRIC INC10 citations71
US6847670B1Jan 25, 2005
Gas laser apparatus emitting ultraviolet radiation
USHIO ELECTRIC INC4 citations62
US6480519B2Nov 12, 2002
Gas laser device that emits ultraviolet rays
USHIO ELECTRIC INC3 citations61
US6754247B2Jun 22, 2004
ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices
USHIO ELECTRIC INC4 citations60