Inventor
FORBES MARTIN L
US19 patents
⚠️ This page may combine multiple inventors who share the name “FORBES MARTIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
16 patentsUS7900776B2Mar 8, 2011
Wafer container with door actuated wafer restraint
ENTEGRIS INC21 citations92
US7866480B2Jan 11, 2011
Front opening substrate container with bottom plate
ENTEGRIS INC16 citations92
US7677393B2Mar 16, 2010
Wafer container and door with vibration dampening latching mechanism
ENTEGRIS INC16 citations92
US7523830B2Apr 28, 2009
Wafer container with secondary wafer restraint system
ENTEGRIS INC21 citations92
US7347329B2Mar 25, 2008
Substrate carrier
ENTEGRIS INC25 citations92
US7201276B2Apr 10, 2007
Front opening substrate container with bottom plate
ENTEGRIS INC24 citations92
US7182203B2Feb 27, 2007
Wafer container and door with vibration dampening latching mechanism
ENTEGRIS INC29 citations92
US7100772B2Sep 5, 2006
Wafer container with door actuated wafer restraint
ENTEGRIS INC22 citations92
US7073667B2Jul 11, 2006
Photochromic substrate container
ENTEGRIS INC19 citations92
US7857683B2Dec 28, 2010
CMP retaining ring
ENTEGRIS INC14 citations84
US7422107B2Sep 9, 2008
Kinematic coupling with textured contact surfaces
ENTEGRIS INC17 citations84
US7325693B2Feb 5, 2008
Wafer container and door with cam latching mechanism
ENTEGRIS INC9 citations84
US7316325B2Jan 8, 2008
Substrate container
ENTEGRIS INC15 citations84
US7344030B2Mar 18, 2008
Wafer carrier with apertured door for cleaning
ENTEGRIS INC7 citations74
US10043696B2Aug 7, 2018
Wafer container with tubular environmental control components
ENTEGRIS INC2 citations73
USD611437SMar 9, 2010
Wafer carrier door
ENTEGRIS INC0 citations52