Inventor

VOURLOUMIS VASSILIS PANAYOTIS

US2 patents

Patents

2 patents

US7453059B2Nov 18, 2008

Technique for monitoring and controlling a plasma process

VARIAN SEMICONDUCTOR EQUIPMENT21 citations91

US7476849B2Jan 13, 2009

Technique for monitoring and controlling a plasma process

VARIAN SEMICONDUCTOR EQUIPMENT10 citations83