Inventor
JINDAL VIBHU
US65 patents
Patents
50 patentsUS10747102B2Aug 18, 2020
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
APPLIED MATERIALS INC26 citations94
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Surface topography measurement apparatus and method
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US10877368B2Dec 29, 2020
Extreme ultraviolet mask blank with alloy absorber and method of manufacture
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US11249388B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC6 citations74
US11754917B2Sep 12, 2023
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
APPLIED MATERIALS INC1 citations73
US11022876B2Jun 1, 2021
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
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US10685821B2Jun 16, 2020
Physical vapor deposition processing systems target cooling
APPLIED MATERIALS INC4 citations73
US11300871B2Apr 12, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC3 citations72
US11387085B2Jul 12, 2022
Multicathode deposition system
APPLIED MATERIALS INC2 citations67
US11940724B2Mar 26, 2024
Reticle processing system
APPLIED MATERIALS INC0 citations62
US11789358B2Oct 17, 2023
Extreme ultraviolet mask blank defect reduction
APPLIED MATERIALS INC0 citations62
US11720013B2Aug 8, 2023
Graded interface in Bragg reflector
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US11675263B2Jun 13, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11668003B2Jun 6, 2023
Deposition system with a multi-cathode
APPLIED MATERIALS INC0 citations62
US11644741B2May 9, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11609490B2Mar 21, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11604151B2Mar 14, 2023
Surface topography measurement apparatus and method
APPLIED MATERIALS INC0 citations62
US11599016B2Mar 7, 2023
Physical vapor deposition system and processes
APPLIED MATERIALS INC0 citations62
US11592738B2Feb 28, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11557473B2Jan 17, 2023
System and method to control PVD deposition uniformity
APPLIED MATERIALS INC1 citations62
US11513437B2Nov 29, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11515132B2Nov 29, 2022
Physical vapor deposition processing systems target cooling
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US11385536B2Jul 12, 2022
EUV mask blanks and methods of manufacture
APPLIED MATERIALS INC0 citations62
US11366379B2Jun 21, 2022
Extreme ultraviolet mask with embedded absorber layer
APPLIED MATERIALS INC0 citations62
US11327394B2May 10, 2022
Graded interface in bragg reflector
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US11300872B2Apr 12, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11275304B2Mar 15, 2022
Extreme ultraviolet mask absorber matertals
APPLIED MATERIALS INC0 citations62
US11275303B2Mar 15, 2022
Extreme ultraviolet mask absorber matertals
APPLIED MATERIALS INC0 citations62
US11275302B2Mar 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11249389B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11249386B2Feb 15, 2022
Extreme ultraviolet mask with backside coating
APPLIED MATERIALS INC0 citations62
US11237473B2Feb 1, 2022
Physical vapor deposition system and processes
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US11236415B2Feb 1, 2022
Deposition system with shield mount
APPLIED MATERIALS INC0 citations62
US11230761B2Jan 25, 2022
Deposition system with a multi-cathode
APPLIED MATERIALS INC0 citations62
US11194244B2Dec 7, 2021
Extreme ultraviolet mask absorber and processes for manufacture
APPLIED MATERIALS INC0 citations62
US11037769B2Jun 15, 2021
Physical vapor deposition processing systems target cooling
APPLIED MATERIALS INC0 citations62
US10763091B2Sep 1, 2020
Physical vapor deposition chamber particle reduction apparatus and methods
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US11860533B2Jan 2, 2024
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11630385B2Apr 18, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11556053B2Jan 17, 2023
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11537040B2Dec 27, 2022
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11480865B2Oct 25, 2022
Method and apparatus to improve EUV mask blank flatness
APPLIED MATERIALS INC0 citations61
US11249390B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11209727B2Dec 28, 2021
Ta—Cu alloy material for extreme ultraviolet mask absorber
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US11669008B2Jun 6, 2023
Extreme ultraviolet mask blank defect reduction methods
APPLIED MATERIALS INC0 citations60
US11480866B2Oct 25, 2022
Method and apparatus to anneal EUV mask blank
APPLIED MATERIALS INC0 citations60
US11815803B2Nov 14, 2023
Multilayer extreme ultraviolet reflector materials
APPLIED MATERIALS INC0 citations59
US11782337B2Oct 10, 2023
Multilayer extreme ultraviolet reflectors
APPLIED MATERIALS INC0 citations59
US11640109B2May 2, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations58
US10504705B2Dec 10, 2019
Physical vapor deposition chamber with static magnet assembly and methods of sputtering
APPLIED MATERIALS INC1 citations56
Showing the top 50 of 65 patents by PatentIndex Score.