Inventor
LIN HONGY
US9 patents
⚠️ This page may combine multiple inventors who share the name “LIN HONGY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WATLOW ELECTRIC MFG
6 patentsUS7126092B2Oct 24, 2006
Heater for wafer processing and methods of operating and manufacturing the same
WATLOW ELECTRIC MFG30 citations92
US7696455B2Apr 13, 2010
Power terminals for ceramic heater and method of making the same
WATLOW ELECTRIC MFG6 citations69
US6986865B2Jan 17, 2006
Method for manufacturing an electrostatic chuck
WATLOW ELECTRIC MFG8 citations65
US7164104B2Jan 16, 2007
In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same
WATLOW ELECTRIC MFG4 citations61
US7304276B2Dec 4, 2007
Thick film heater integrated with low temperature components and method of making the same
WATLOW ELECTRIC MFG5 citations59
US7832616B2Nov 16, 2010
Methods of securing a thermocouple to a ceramic substrate
WATLOW ELECTRIC MFG2 citations55