Inventor
LATULIPE DOUGLAS CHARLES
US3 patents
Patents
3 patentsUS7361444B1Apr 22, 2008
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
IBM22 citations92
US7709177B2May 4, 2010
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
IBM7 citations73
US7736833B2Jun 15, 2010
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
IBM3 citations62