Inventor
AMADATSU SHIGEKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “AMADATSU SHIGEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIHEN CORP
8 patentsUS5843236ADec 1, 1998
Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber
DAIHEN CORP58 citations93
US7714594B2May 11, 2010
Current detection printed board, voltage detection printed board, and current/voltage detector using same, and current detector and voltage detector
DAIHEN CORP23 citations89
US6401653B1Jun 11, 2002
Microwave plasma generator
DAIHEN CORP28 citations89
US7489145B2Feb 10, 2009
Plasma processing system
DAIHEN CORP15 citations83
US10014162B2Jul 3, 2018
Plasma generation apparatus for generating toroidal plasma
DAIHEN CORP2 citations72
US6726803B2Apr 27, 2004
Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
DAIHEN CORP3 citations60
US10306744B2May 28, 2019
Plasma generation apparatus and high-frequency power source
DAIHEN CORP0 citations32
US10755898B2Aug 25, 2020
Plasma generating device
DAIHEN CORP0 citations29