Inventor
LEE JAE-CHULL
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEE JAE-CHULL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7665951B2Feb 23, 2010
Multiple slot load lock chamber and method of operation
APPLIED MATERIALS INC53 citations97
US7845891B2Dec 7, 2010
Decoupled chamber body
APPLIED MATERIALS INC29 citations92
US7822324B2Oct 26, 2010
Load lock chamber with heater in tube
APPLIED MATERIALS INC10 citations83
US7497414B2Mar 3, 2009
Curved slit valve door with flexible coupling
APPLIED MATERIALS INC16 citations82
US7845618B2Dec 7, 2010
Valve door with ball coupling
APPLIED MATERIALS INC7 citations71