Inventor
KISHITA NAOFUMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KISHITA NAOFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUSD610176SFeb 16, 2010
Coater cup
TOKYO ELECTRON LTD37 citations90
US9620394B2Apr 11, 2017
Liquid treatment apparatus
TOKYO ELECTRON LTD8 citations83
US8375887B2Feb 19, 2013
Solution treatment apparatus, solution treatment method and resist coating method
TOKYO ELECTRON LTD5 citations72
US10643872B2May 5, 2020
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US9899244B2Feb 20, 2018
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US9027508B2May 12, 2015
Periphery coating apparatus, periphery coating method and storage medium therefor
TOKYO ELECTRON LTD5 citations71
US7344600B2Mar 18, 2008
Substrate treatment apparatus
TOKYO ELECTRON LTD6 citations62
US8722152B2May 13, 2014
Wet processing apparatus, wet processing method and storage medium
TOKYO ELECTRON LTD0 citations51
US9082614B1Jul 14, 2015
Periphery coating apparatus, periphery coating method and storage medium therefor
TOKYO ELECTRON LTD0 citations50
US8354141B2Jan 15, 2013
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
TOKYO ELECTRON LTD0 citations49
US7984690B2Jul 26, 2011
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
TOKYO ELECTRON LTD0 citations49