Inventor

TAKUMA KOUJI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “TAKUMA KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US11062930B2Jul 13, 2021

Substrate processing device and substrate conveying method

TOKYO ELECTRON LTD0 citations46

US11043399B2Jun 22, 2021

Substrate processing apparatus and operation method of substrate processing apparatus

TOKYO ELECTRON LTD0 citations45

US11282719B2Mar 22, 2022

Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition

TOKYO ELECTRON LTD0 citations41

TAKUMA KOUJI

1 patent

US8509937B2Aug 13, 2013

Processing apparatus and operating method therefor

TAKUMA KOUJI6 citations62

YOSHIDA MASAHIRO

1 patent

US8447422B2May 21, 2013

Substrate processing apparatus, substrate processing method, and storage medium

YOSHIDA MASAHIRO3 citations60

TOKYO ELECTRONICS LTD

1 patent

US10043692B2Aug 7, 2018

Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program

TOKYO ELECTRONICS LTD0 citations28