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Inventor
CZARNETZKI UWE
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “CZARNETZKI UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RUHR UNIVERSITÄT BOCHUM
1 patent
US8933629B2
Jan 13, 2015
Method for controlling ion energy in radio frequency plasmas
RUHR UNIVERSITÄT BOCHUM
20 citations
82
HEIL BRIAN GEORGE
1 patent
US8643280B2
Feb 4, 2014
Method for controlling ion energy in radio frequency plasmas
HEIL BRIAN GEORGE
4 citations
61