Inventor

MUSSENBROCK THOMAS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MUSSENBROCK THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUHR UNIVERSITÄT BOCHUM

1 patent

US8933629B2Jan 13, 2015

Method for controlling ion energy in radio frequency plasmas

RUHR UNIVERSITÄT BOCHUM20 citations82

HEIL BRIAN GEORGE

1 patent

US8643280B2Feb 4, 2014

Method for controlling ion energy in radio frequency plasmas

HEIL BRIAN GEORGE4 citations61

BRINKMANN RALF PETER

1 patent

US9113543B2Aug 18, 2015

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

BRINKMANN RALF PETER0 citations30