Inventor

NAOI MAMORU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NAOI MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YOSHIMURA AKIHIRO

1 patent

US9455125B2Sep 27, 2016

Substrate processing apparatus

YOSHIMURA AKIHIRO3 citations70

TOKYO ELECTRON LTD

1 patent

US9524847B2Dec 20, 2016

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations50

WADA NOBUHIRO

1 patent

US8592319B2Nov 26, 2013

Substrate processing method and substrate processing apparatus

WADA NOBUHIRO0 citations43