Inventor
STUEHLER JOACHIM
DE11 patents
⚠️ This page may combine multiple inventors who share the name “STUEHLER JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS7408631B2Aug 5, 2008
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask
ZEISS CARL SMT AG9 citations82
US7408652B2Aug 5, 2008
Device and method for the optical measurement of an optical system by using an immersion fluid
ZEISS CARL SMT AG12 citations81
US7019824B2Mar 28, 2006
Moire method and measuring system for measuring the distortion of an optical imaging system
ZEISS CARL SMT AG11 citations81
US7755748B2Jul 13, 2010
Device and method for range-resolved determination of scattered light, and an illumination mask
ZEISS CARL SMT AG4 citations61
ZEISS CARL SMT GMBH
4 patentsUS8988752B2Mar 24, 2015
Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus
ZEISS CARL SMT GMBH4 citations68
US8836929B2Sep 16, 2014
Device and method for the optical measurement of an optical system by using an immersion fluid
ZEISS CARL SMT GMBH0 citations51
US10042271B2Aug 7, 2018
Projection exposure system for microlithography with a measurement device
ZEISS CARL SMT GMBH0 citations50
US9696639B2Jul 4, 2017
Projection exposure system for microlithography with a measurement device
ZEISS CARL SMT GMBH0 citations50