Inventor
SASAKI NORIKAZU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI NORIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6986261B2Jan 17, 2006
Method and system for controlling chiller and semiconductor processing system
TOKYO ELECTRON LTD22 citations92
US10472717B2Nov 12, 2019
Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus
TOKYO ELECTRON LTD6 citations68
US10607819B2Mar 31, 2020
Cleaning method and processing apparatus
TOKYO ELECTRON LTD1 citations62
US10168049B2Jan 1, 2019
Method for preventing explosion of exhaust gas in decompression processing apparatus
TOKYO ELECTRON LTD1 citations61
US9904299B2Feb 27, 2018
Gas supply control method
TOKYO ELECTRON LTD0 citations39