Inventor
HEO HOYOUNG
KR3 patents
Patents
3 patentsUS10409171B2Sep 10, 2019
Overlay control with non-zero offset prediction
KLA TENCOR CORP3 citations71
US10340165B2Jul 2, 2019
Systems and methods for automated multi-zone detection and modeling
KLA TENCOR CORP2 citations63
US10691028B2Jun 23, 2020
Overlay variance stabilization methods and systems
KLA TENCOR CORP0 citations29