Inventor
PIERSON WILLIAM
US9 patents
⚠️ This page may combine multiple inventors who share the name “PIERSON WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS10409171B2Sep 10, 2019
Overlay control with non-zero offset prediction
KLA TENCOR CORP3 citations71
US10754260B2Aug 25, 2020
Method and system for process control with flexible sampling
KLA TENCOR CORP3 citations68
US10707107B2Jul 7, 2020
Adaptive alignment methods and systems
KLA TENCOR CORP2 citations65
US10444639B2Oct 15, 2019
Layer-to-layer feedforward overlay control with alignment corrections
KLA TENCOR CORP4 citations64
US10340165B2Jul 2, 2019
Systems and methods for automated multi-zone detection and modeling
KLA TENCOR CORP2 citations63
US10692227B2Jun 23, 2020
Determination of sampling maps for alignment measurements based on reduction of out of specification points
KLA TENCOR CORP1 citations54
US10691028B2Jun 23, 2020
Overlay variance stabilization methods and systems
KLA TENCOR CORP0 citations29