Inventor
DEMIRER ONUR N
US3 patents
Patents
3 patentsUS10340165B2Jul 2, 2019
Systems and methods for automated multi-zone detection and modeling
KLA TENCOR CORP2 citations63
US10692227B2Jun 23, 2020
Determination of sampling maps for alignment measurements based on reduction of out of specification points
KLA TENCOR CORP1 citations54
US10691028B2Jun 23, 2020
Overlay variance stabilization methods and systems
KLA TENCOR CORP0 citations29