Inventor
KAUPMANN PHILIP
DE3 patents
Patents
3 patentsUS11307404B2Apr 19, 2022
Micromechanical micromirror array and corresponding operating method
BOSCH GMBH ROBERT6 citations72
US11066295B2Jul 20, 2021
Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
BOSCH GMBH ROBERT0 citations50
US11061221B2Jul 13, 2021
Micromechanical component, method for manufacturing a micromechanical component, and method for exciting a movement of an adjustable part about a rotational axis
BOSCH GMBH ROBERT0 citations42