P

Inventor

ROCHE GREGORY A

US13 patents
⚠️ This page may combine multiple inventors who share the name “ROCHE GREGORY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED ENERGY IND INC

3 patents
US6432260B1Aug 13, 2002

Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof

ADVANCED ENERGY IND INC160 citations98
US6902646B2Jun 7, 2005

Sensor array for measuring plasma characteristics in plasma processing environments

ADVANCED ENERGY IND INC170 citations96
US6830650B2Dec 14, 2004

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED ENERGY IND INC107 citations96

ROCHE GREGORY A

3 patents
US4581248AApr 8, 1986

Apparatus and method for laser-induced chemical vapor deposition

ROCHE GREGORY A69 citations94
US4694777ASep 22, 1987

Apparatus for, and methods of, depositing a substance on a substrate

ROCHE GREGORY A29 citations91
US4782787ANov 8, 1988

Apparatus for laser-induced chemical vapor deposition

ROCHE GREGORY A16 citations72

LAM RES CORP

2 patents
US5913140AJun 15, 1999

Method for reduction of plasma charging damage during chemical vapor deposition

LAM RES CORP239 citations97
US6200651B1Mar 13, 2001

Method of chemical vapor deposition in a vacuum plasma processor responsive to a pulsed microwave source

LAM RES CORP74 citations96

APJET INC

2 patents
US11610765B1Mar 21, 2023

Atmospheric-pressure plasma processing apparatus and method using argon plasma gas

APJET INC1 citations56
US12251483B2Mar 18, 2025

Gliding arc discharge sterilization of surfaces, objects, and ambient air

APJET INC0 citations41

ADVANCED PLASMA INC

1 patent
US7192505B2Mar 20, 2007

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED PLASMA INC51 citations91

MAHONEY LEONARD J

1 patent
US8545669B2Oct 1, 2013

Sensor array for measuring plasma characteristics in plasma processing environments

MAHONEY LEONARD J24 citations87

CORNELIUS CARRIE E

1 patent
US11149370B2Oct 19, 2021

Atmospheric-pressure plasma processing apparatus and method

CORNELIUS CARRIE E8 citations73