Inventor
ZHANG YUXING
CN19 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG YUXING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS10889894B2Jan 12, 2021
Faceplate with embedded heater
APPLIED MATERIALS INC7 citations82
US11742185B2Aug 29, 2023
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC2 citations72
US10600624B2Mar 24, 2020
System and method for substrate processing chambers
APPLIED MATERIALS INC5 citations70
US12347653B2Jul 1, 2025
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC0 citations62
US11952660B2Apr 9, 2024
Semiconductor processing chambers and methods for cleaning the same
APPLIED MATERIALS INC1 citations62
US10907252B2Feb 2, 2021
Horizontal heat choke faceplate design
APPLIED MATERIALS INC0 citations60
US12012653B2Jun 18, 2024
Cleaning assemblies for substrate processing chambers
APPLIED MATERIALS INC1 citations59