Inventor
KOBAYASHI NAOAKI
6 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI NAOAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS5591494AJan 7, 1997
Deposition of silicon nitrides by plasma-enhanced chemical vapor deposition
APPLIED MATERIALS INC124 citations98
US5129958AJul 14, 1992
Cleaning method for semiconductor wafer processing apparatus
APPLIED MATERIALS INC125 citations97
US5508067AApr 16, 1996
Deposition of silicon nitride by plasma-enchanced chemical vapor deposition
APPLIED MATERIALS INC89 citations95