Inventor
KOBARI HIDEYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KOBARI HIDEYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
7 patentsUS5439519AAug 8, 1995
Solution applying apparatus
TOKYO OHKA KOGYO CO LTD58 citations94
US6214104B1Apr 10, 2001
Coating solution for forming silica coating and method of forming silica coating
TOKYO OHKA KOGYO CO LTD21 citations92
US5614271AMar 25, 1997
Method for the formation of a silica-based coating film
TOKYO OHKA KOGYO CO LTD39 citations91
US6597027B1Jul 22, 2003
Dielectric element and method for fabricating the same
TOKYO OHKA KOGYO CO LTD14 citations84
US6787412B2Sep 7, 2004
Dielectric element and method for fabricating the same
TOKYO OHKA KOGYO CO LTD2 citations62
US6277441B1Aug 21, 2001
Method of forming coating film on a substrate
TOKYO OHKA KOGYO CO LTD3 citations62
US7884062B2Feb 8, 2011
Cleaning liquid for lithography and cleaning method using same
TOKYO OHKA KOGYO CO LTD4 citations61