Inventor
JOHNSTON GREGORY P
US8 patents
Patents
8 patentsUS5955140ASep 21, 1999
Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates
TEXAS INSTRUMENTS INC94 citations97
US6380105B1Apr 30, 2002
Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates
TEXAS INSTRUMENTS INC50 citations96
US6319852B1Nov 20, 2001
Nanoporous dielectric thin film formation using a post-deposition catalyst
TEXAS INSTRUMENTS INC56 citations96
US6063714AMay 16, 2000
Nanoporous dielectric thin film surface modification
TEXAS INSTRUMENTS INC76 citations96
US6645878B2Nov 11, 2003
Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates
TEXAS INSTRUMENTS INC17 citations92
US6130152AOct 10, 2000
Aerogel thin film formation from multi-solvent systems
TEXAS INSTRUMENTS INC27 citations92
US5753305AMay 19, 1998
Rapid aging technique for aerogel thin films
TEXAS INSTRUMENTS INC43 citations92
US6437007B1Aug 20, 2002
Aerogel thin film formation from multi-solvent systems
TEXAS INSTRUMENTS INC9 citations74