Inventor
LIU LU-MIN
TW13 patents
⚠️ This page may combine multiple inventors who share the name “LIU LU-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
7 patentsUS5679606AOct 21, 1997
method of forming inter-metal-dielectric structure
TAIWAN SEMICONDUCTOR MFG361 citations98
US6004873ADec 21, 1999
Method for reducing the pattern sensitivity of ozone assisted chemical vapor deposited (CVD) silicon oxide insulator layers
TAIWAN SEMICONDUCTOR MFG19 citations92
US5563104AOct 8, 1996
Reduction of pattern sensitivity in ozone-teos deposition via a two-step (low and high temperature) process
TAIWAN SEMICONDUCTOR MFG28 citations92
US5536681AJul 16, 1996
PE-OX/ozone-TEOS gap filling capability by selective N2 treatment on PE-OX
TAIWAN SEMICONDUCTOR MFG42 citations92
US5804498ASep 8, 1998
Method of making an underlayer to reduce pattern sensitivity of ozone-TEOS
TAIWAN SEMICONDUCTOR MFG8 citations73
US5723380AMar 3, 1998
Method of approach to improve metal lithography and via-plug integration
TAIWAN SEMICONDUCTOR MFG8 citations73
US5965938AOct 12, 1999
Integrated two-tiered via-plug to improve metal lithography # 4
TAIWAN SEMICONDUCTOR MFG4 citations62
UNITED MICROELECTRONICS CORP
3 patentsUS6248641B1Jun 19, 2001
Method of fabricating shallow trench isolation
UNITED MICROELECTRONICS CORP15 citations81
US6376882B1Apr 23, 2002
Electrostatic discharge protection apparatus with silicon control rectifier and the method of fabricating the same
UNITED MICROELECTRONICS CORP5 citations73
US6548360B2Apr 15, 2003
Electrostatic discharge protection apparatus with silicon control rectifier and the method of fabricating the same
UNITED MICROELECTRONICS CORP4 citations62