Inventor · disambiguated record
Koji Iwasawa
Also filed as: IWASAWA KOJI
7 granted patents·142 citations·filing 1999–2004
87Inventor score
Top patents by PatentIndex Score
7 records- 0185US6750462B2Ion implanting method and apparatusNISSIN ELECTRIC CO LTD·Filed 2002·Granted Jun 15, 2004·30 cites·5 claims
- 0278US6313474B1Method for measuring distribution of beams of charged particles and methods relating theretoNISSIN ELECTRIC CO LTD·Filed 1999·Granted Nov 6, 2001·33 cites·4 claims
- 0377US7375354B2Ion implanting method and apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted May 20, 2008·18 cites·1 claims
- 0477US6614027B1Method of controlling electrostatic lens and ion implantation apparatusNISSIN ELECTRIC CO LTD·Filed 2000·Granted Sep 2, 2003·13 cites·6 claims
- 0573US7085674B2Alarm management method and apparatus thereforNISSIN ION EQUIPMENT CO LTD·Filed 2003·Granted Aug 1, 2006·34 cites·20 claims
- 0671US7034543B2Method of predicting a lifetime of filament in ion source and ion source deviceNISSIN ELECTRIC CO LTD·Filed 2003·Granted Apr 25, 2006·9 cites·6 claims
- 0764US6770889B2Method of controlling electrostatic lens and ion implantation apparatusNISSIN ELECTRIC CO LTD·Filed 2003·Granted Aug 3, 2004·5 cites·10 claims
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