Inventor
ONO YOSHIHARU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ONO YOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
2 patentsUS10192741B2Jan 29, 2019
Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP3 citations72
US9793120B2Oct 17, 2017
Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP2 citations72
MITSUBISHI ELECTRIC CORP
2 patentsUS6555790B1Apr 29, 2003
Semiconductor manufacturing apparatus, method for cleaning the semiconductor manufacturing apparatus, and light source unit
MITSUBISHI ELECTRIC CORP10 citations67
US7030007B2Apr 18, 2006
Via-filling material and process for fabricating semiconductor integrated circuit using the material
MITSUBISHI ELECTRIC CORP3 citations61