Inventor
HATTORI SACHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HATTORI SACHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS6197679B1Mar 6, 2001
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP52 citations94
US6005295ADec 21, 1999
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP14 citations72
US6555790B1Apr 29, 2003
Semiconductor manufacturing apparatus, method for cleaning the semiconductor manufacturing apparatus, and light source unit
MITSUBISHI ELECTRIC CORP10 citations67
US6509251B2Jan 21, 2003
Method of forming a resist pattern for blocking implantation of an impurity into a semiconductor substrate
MITSUBISHI ELECTRIC CORP2 citations62