Inventor
ASAOKA YASUHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ASAOKA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS6431183B1Aug 13, 2002
Method for treating semiconductor substrates
MITSUBISHI ELECTRIC CORP21 citations91
US6586145B2Jul 1, 2003
Method of fabricating semiconductor device and semiconductor device
MITSUBISHI ELECTRIC CORP8 citations72
US6368415B1Apr 9, 2002
Method for washing semiconductor substrate and washing apparatus therefor
MITSUBISHI ELECTRIC CORP10 citations71
US6531381B2Mar 11, 2003
Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device
MITSUBISHI ELECTRIC CORP0 citations51