P

Inventor

ASAKA KOICHI

JP4 patents
⚠️ This page may combine multiple inventors who share the name “ASAKA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US6332723B1Dec 25, 2001

Substrate processing apparatus and method

TOKYO ELECTRON LTD51 citations91
US7517217B2Apr 14, 2009

Method and apparatus for heat processing of substrate

TOKYO ELECTRON LTD2 citations61
US6969538B2Nov 29, 2005

Method for heat processing of substrate

TOKYO ELECTRON LTD1 citations50

PANASONIC IP MAN CO LTD

1 patent
US10763912B2Sep 1, 2020

Demodulation apparatus, reception apparatus, and demodulation method

PANASONIC IP MAN CO LTD0 citations36