Inventor
NIIMI GOTA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NIIMI GOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
USHIO ELECTRIC INC
7 patentsUS9480136B2Oct 25, 2016
Extreme UV radiation light source device
USHIO ELECTRIC INC10 citations80
US9686846B2Jun 20, 2017
Extreme UV radiation light source device
USHIO ELECTRIC INC0 citations48
US9572240B2Feb 14, 2017
Light source apparatus
USHIO ELECTRIC INC0 citations48
US7482740B2Jan 27, 2009
Electrode unit of extreme ultraviolet generator
USHIO ELECTRIC INC0 citations48
US10591342B2Mar 17, 2020
Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device
USHIO ELECTRIC INC0 citations35
US9581392B2Feb 28, 2017
Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type
USHIO ELECTRIC INC0 citations33
US9202659B2Dec 1, 2015
Arrangement and method for cooling a plasma-based radiation source
USHIO ELECTRIC INC0 citations29
GIGAPHOTON INC
2 patentsUS11940736B2Mar 26, 2024
Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations61
US11145429B2Oct 12, 2021
Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device
GIGAPHOTON INC0 citations50