Inventor

STEIJNS HUBERT MATTHIEU RICHARD

NL3 patents

Patents

3 patents

US7791709B2Sep 7, 2010

Substrate support and lithographic process

ASML NETHERLANDS BV11 citations82

US12248255B2Mar 11, 2025

Differential measurement system

ASML NETHERLANDS BV0 citations46

US10268128B2Apr 23, 2019

Lithographic apparatus

ASML NETHERLANDS BV0 citations32