Inventor
KINPARA Yuuki
JP5 patents
Patents
5 patentsUS10923381B2Feb 16, 2021
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US12280578B2Apr 22, 2025
Method for repairing electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD0 citations59
US11471987B2Oct 18, 2022
Electrostatic chuck device and electrostatic chuck device manufacturing method
SUMITOMO OSAKA CEMENT CO LTD1 citations57
US11024528B2Jun 1, 2021
Electrostatic chuck device having focus ring
SUMITOMO OSAKA CEMENT CO LTD0 citations49
US11348819B2May 31, 2022
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD0 citations48