Inventor
ISHIMURA KAZUNORI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMURA KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO OSAKA CEMENT CO LTD
5 patentsUS10923381B2Feb 16, 2021
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US10475688B2Nov 12, 2019
Electrostatic chuck device, and semiconductor manufacturing device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US9209061B2Dec 8, 2015
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD5 citations71
US6730276B2May 4, 2004
Plastic film electrostatic adsorption apparatus and electrostatic adsorption method
SUMITOMO OSAKA CEMENT CO LTD4 citations56
US11348819B2May 31, 2022
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD0 citations48