P

Inventor

KOUNO HITOSHI

JP10 patents
⚠️ This page may combine multiple inventors who share the name “KOUNO HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO OSAKA CEMENT CO LTD

6 patents
US10153192B2Dec 11, 2018

Electrostatic chuck device

SUMITOMO OSAKA CEMENT CO LTD3 citations72
US10923381B2Feb 16, 2021

Electrostatic chuck device

SUMITOMO OSAKA CEMENT CO LTD2 citations71
US10262886B2Apr 16, 2019

Electrostatic chuck device

SUMITOMO OSAKA CEMENT CO LTD2 citations68
US10068790B2Sep 4, 2018

Electrostatic chuck device

SUMITOMO OSAKA CEMENT CO LTD2 citations66
US11024528B2Jun 1, 2021

Electrostatic chuck device having focus ring

SUMITOMO OSAKA CEMENT CO LTD0 citations49
US11348819B2May 31, 2022

Electrostatic chuck device

SUMITOMO OSAKA CEMENT CO LTD0 citations48

OHNISHI TOHRU

1 patent
US8130499B2Mar 6, 2012

Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board

OHNISHI TOHRU39 citations90

SASAKI YASUHARU

1 patent
US8981263B2Mar 17, 2015

Electrostatic chuck apparatus

SASAKI YASUHARU15 citations82

TOKYO ELECTRON LTD

1 patent
US9721822B2Aug 1, 2017

Electrostatic chuck apparatus

TOKYO ELECTRON LTD3 citations71

KOSAKAI MAMORU

1 patent
US10502639B2Dec 10, 2019

Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same

KOSAKAI MAMORU2 citations69