Inventor
CHEN JIALING
US13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JIALING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PIVOTAL SYSTEMS CORP
4 patentsUS7823436B2Nov 2, 2010
Method and apparatus for in situ testing of gas flow controllers
PIVOTAL SYSTEMS CORP37 citations95
US9983595B2May 29, 2018
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP5 citations82
US9904297B2Feb 27, 2018
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP6 citations82
US9523435B2Dec 20, 2016
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP5 citations82
MONKOWSKI JOSEPH R
4 patentsUS8240324B2Aug 14, 2012
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R29 citations91
US8857456B2Oct 14, 2014
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R12 citations89
US8667830B2Mar 11, 2014
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R9 citations83
US9400004B2Jul 26, 2016
Transient measurements of mass flow controllers
MONKOWSKI JOSEPH R16 citations82
CHUNG SHERK
3 patentsUS8271210B2Sep 18, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK23 citations90
US8271211B2Sep 18, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK25 citations90
US8265888B2Sep 11, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK25 citations90