Inventor
ROVIRA PABLO I
US11 patents
⚠️ This page may combine multiple inventors who share the name “ROVIRA PABLO I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
9 patentsUS6856384B1Feb 15, 2005
Optical metrology system with combined interferometer and ellipsometer
NANOMETRICS INC85 citations97
US6522406B1Feb 18, 2003
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer
NANOMETRICS INC119 citations97
US7115858B1Oct 3, 2006
Apparatus and method for the measurement of diffracting structures
NANOMETRICS INC55 citations95
US6713753B1Mar 30, 2004
Combination of normal and oblique incidence polarimetry for the characterization of gratings
NANOMETRICS INC66 citations94
US7372565B1May 13, 2008
Spectrometer measurement of diffracting structures
NANOMETRICS INC46 citations92
US7064828B1Jun 20, 2006
Pulsed spectroscopy with spatially variable polarization modulation element
NANOMETRICS INC33 citations92
US7061613B1Jun 13, 2006
Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation
NANOMETRICS INC35 citations92
US6665070B1Dec 16, 2003
Alignment of a rotatable polarizer with a sample
NANOMETRICS INC40 citations92
US7173417B1Feb 6, 2007
Eddy current sensor with concentric confocal distance sensor
NANOMETRICS INC17 citations82