Inventor
ISHII HIROMU
JP16 patents
⚠️ This page may combine multiple inventors who share the name “ISHII HIROMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON TELEGRAPH & TELEPHONE
11 patentsUS5723383AMar 3, 1998
Semiconductor substrate treatment method
NIPPON TELEGRAPH & TELEPHONE20 citations91
US6912336B2Jun 28, 2005
Optical switch device
NIPPON TELEGRAPH & TELEPHONE31 citations89
US7360293B2Apr 22, 2008
Method of manufacturing recognition sensor
NIPPON TELEGRAPH & TELEPHONE9 citations84
US6844744B2Jan 18, 2005
Surface shape recognition sensor and method of manufacturing the same
NIPPON TELEGRAPH & TELEPHONE14 citations82
US7123026B2Oct 17, 2006
Surface shape recognition sensor and method of manufacturing the same
NIPPON TELEGRAPH & TELEPHONE8 citations74
US7208809B2Apr 24, 2007
Semiconductor device having MEMS
NIPPON TELEGRAPH & TELEPHONE8 citations72
US7978388B2Jul 12, 2011
Mirror device and mirror device manufacturing method incorporating a collision preventive structure
NIPPON TELEGRAPH & TELEPHONE6 citations61
US7482196B2Jan 27, 2009
Method of manufacturing a semiconductor device having MEMS
NIPPON TELEGRAPH & TELEPHONE3 citations61
US6468895B2Oct 22, 2002
Pattern forming method
NIPPON TELEGRAPH & TELEPHONE2 citations61
US6743653B2Jun 1, 2004
Micromachine manufacturing method
NIPPON TELEGRAPH & TELEPHONE4 citations60
US7189625B2Mar 13, 2007
Micromachine and manufacturing method
NIPPON TELEGRAPH & TELEPHONE0 citations50
SHIMOKAWA FUSAO
4 patentsUS8149489B2Apr 3, 2012
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO10 citations82
US8634121B2Jan 21, 2014
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50
US8582189B2Nov 12, 2013
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50
US8462410B2Jun 11, 2013
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50