Inventor
YAMADA TAKEYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA TAKEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
4 patentsUS7804648B2Sep 28, 2010
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask
HOYA CORP3 citations61
US7901842B2Mar 8, 2011
Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device
HOYA CORP1 citations51
US10481488B2Nov 19, 2019
Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method
HOYA CORP0 citations39
US10310373B2Jun 4, 2019
Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask
HOYA CORP0 citations39
YAMADA TAKEYUKI
3 patentsUS8802334B2Aug 12, 2014
Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask
YAMADA TAKEYUKI7 citations80
US8697315B2Apr 15, 2014
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method
YAMADA TAKEYUKI0 citations50
US8114556B2Feb 14, 2012
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method
YAMADA TAKEYUKI1 citations50