Inventor

YOKOYA YASUNORI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YOKOYA YASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOYA CORP

2 patents

US5723237AMar 3, 1998

Method for determining baking conditions for resist pattern formation through development of unexposed trial resist films

HOYA CORP31 citations88

US7713663B2May 11, 2010

Mask blank, manufacturing method of mask blank, manufacturing method of transfer mask and manufacturing method of semiconductor device

HOYA CORP2 citations60

YAMADA TAKEYUKI

1 patent

US8802334B2Aug 12, 2014

Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask

YAMADA TAKEYUKI7 citations80