Inventor
WILLIAMS III WILLIAM
US10 patents
Patents
10 patentsUS8900794B2Dec 2, 2014
Photoacid generator and photoresist comprising same
ROHM & HAAS ELECT MAT7 citations83
US10539870B2Jan 21, 2020
Photoresists comprising carbamate component
ROHM & HAAS ELECT MAT2 citations72
US11960206B2Apr 16, 2024
Photoresist composition, coated substrate including the photoresist composition, and method of forming electronic device
ROHM & HAAS ELECT MAT0 citations62
US11550217B2Jan 10, 2023
Photoresist composition, coated substrate including the photoresist composition, and method of forming electronic device
ROHM & HAAS ELECT MAT0 citations62
US8956799B2Feb 17, 2015
Photoacid generator and photoresist comprising same
ROHM & HAAS ELECT MAT2 citations62
US10509315B2Dec 17, 2019
Photoacid generator
ROHM & HAAS ELECT MAT0 citations51
US10317795B2Jun 11, 2019
Photoacid generator
ROHM & HAAS ELECT MAT0 citations51
US9921475B1Mar 20, 2018
Photoacid-generating compound, polymer derived therefrom, photoresist composition including the photoacid-generating compound or polymer, and method of forming a photoresist relief image
ROHM & HAAS ELECT MAT1 citations51
US9146470B2Sep 29, 2015
Photoacid generator and photoresist comprising same
ROHM & HAAS ELECT MAT0 citations51
US9440899B2Sep 13, 2016
Purification method
ROHM & HAAS ELECT MAT0 citations36