Inventor

SATOU MITSUO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SATOU MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASANO YUUSUKE

1 patent

US8728706B2May 20, 2014

Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound

ASANO YUUSUKE4 citations68

SATOU MITSUO

1 patent

US8758978B2Jun 24, 2014

Radiation-sensitive resin composition, resist pattern formation method, and polymer

SATOU MITSUO4 citations61

JSR CORP

1 patent

US9513548B2Dec 6, 2016

Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound

JSR CORP2 citations60