Inventor

TOEPFER SUSANNE

DE2 patents

Patents

2 patents

US12105427B2Oct 1, 2024

Method and device for correcting a telecentricity error of an imaging device

ZEISS CARL SMT GMBH0 citations54

US9785058B2Oct 10, 2017

Method for ascertaining distortion properties of an optical system in a measurement system for microlithography

ZEISS CARL SMT GMBH0 citations34