Inventor
HIMMELHAUS MICHAEL
DE8 patents
⚠️ This page may combine multiple inventors who share the name “HIMMELHAUS MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HIMMELHAUS MICHAEL
3 patentsUS8502972B2Aug 6, 2013
Clusters of microresonators for cavity mode optical sensing
HIMMELHAUS MICHAEL11 citations79
US8471217B2Jun 25, 2013
Fluorescent non-metallic particles encapsulated in a metallic coating
HIMMELHAUS MICHAEL7 citations79
US8586142B2Nov 19, 2013
Method and apparatus for producing small structures
HIMMELHAUS MICHAEL5 citations59
ZEISS CARL SMT GMBH
3 patentsUS10599936B2Mar 24, 2020
Method for correcting the distortion of a first imaging optical unit of a first measurement system
ZEISS CARL SMT GMBH0 citations40
US10429731B2Oct 1, 2019
Method and device for generating a reference image in the characterization of a mask for microlithography
ZEISS CARL SMT GMBH0 citations39
US9785058B2Oct 10, 2017
Method for ascertaining distortion properties of an optical system in a measurement system for microlithography
ZEISS CARL SMT GMBH0 citations34