Inventor
HAVERKAMP JASON DIRK
US3 patents
Patents
3 patentsUS10214816B2Feb 26, 2019
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC6 citations81
US9873946B2Jan 23, 2018
Multi-station sequential curing of dielectric films
NOVELLUS SYSTEMS INC3 citations72
US12385138B2Aug 12, 2025
Plasma-enhanced deposition of film stacks
NOVELLUS SYSTEMS INC0 citations60