Inventor

SERGI STEVEN G

US2 patents

Patents

2 patents

US9960042B2May 1, 2018

Carbon dopant gas and co-flow for implant beam and source life performance improvement

ENTEGRIS INC4 citations71

US10354877B2Jul 16, 2019

Carbon dopant gas and co-flow for implant beam and source life performance improvement

ENTEGRIS INC0 citations50