Inventor

SATO MICHITO

JP24 patents

⚠️ This page may combine multiple inventors who share the name “SATO MICHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SATO MICHITO

SHINETSU HANDOTAI KK

Wafer etching apparatus

Polishing apparatus with a waste liquid receiver

Polishing method and polishing apparatus

Apparatus for dressing urethane foam pad for use in polishing

Polishing method

Polishing apparatus and wafer polishing method

Method for measuring template and method for evaluating same

Final polishing method of silicon wafer and silicon wafer

Turn table transport carriage

Polishing apparatus

Method for manufacturing polishing head, polishing head, and polishing apparatus

LION FAT OIL CO LTD

Method for preparation of olefin oligomer

Method for preparation of olefin oligomer

Method for preparation of polyolefin oil

Process for the production of tertiary amine having long chain alkyl group

Method for preparation of liquid olefin polymers

SEH AMERICA INC

Method for automatically transferring wafers between wafer holders in a liquid environment

Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment

System for reducing wafer contamination using freshly, conditioned alkaline etching solution

Back side damage monitoring system

FUJIBO HOLDINGS INC

Polishing pad and method for manufacturing the same

SHIN ETSU HANDOTAI CO LTD

Method and apparatus for polishing wafer

(unassigned)

Use of H2 O2 solution as a method of post lap cleaning

SATO MICHITO

Semiconductor wafer and manufacturing method thereof