Inventor
HAYASHIHARA HIDEMOTO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHIHARA HIDEMOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
6 patentsUS11387152B1Jul 12, 2022
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP2 citations71
US10937676B2Mar 2, 2021
Substrate processing apparatus and device management controller
KOKUSAI ELECTRIC CORP4 citations71
US11996337B2May 28, 2024
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US11966210B2Apr 23, 2024
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11782425B2Oct 10, 2023
Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11237538B2Feb 1, 2022
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
HITACHI INT ELECTRIC INC
2 patentsUS10860005B2Dec 8, 2020
Substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations71
US11086304B2Aug 10, 2021
Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis
HITACHI INT ELECTRIC INC0 citations50